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Determination of the vapour pressure curves and vaporization enthalpies of hafnium alkoxides using thermogravimetric analysis
In order to identify a volatile metallo-organic precursor for the deposition of hafnium oxide (HfO(2)) films for atomic layer deposition (ALD) applications, the evaporative properties of hafnium alkoxides (hafnium isopropoxide, hafnium n-propoxide and hafnium n-butoxide) were investigated using ther...
Gorde:
| Argitaratua izan da: | R Soc Open Sci |
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| Egile Nagusiak: | , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
The Royal Society
2019
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6366183/ https://ncbi.nlm.nih.gov/pubmed/30800369 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1098/rsos.181193 |
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