Yüklüyor......
Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection
This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silico...
Kaydedildi:
| Yayımlandı: | Sensors (Basel) |
|---|---|
| Asıl Yazarlar: | , , , , , , |
| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
MDPI
2019
|
| Konular: | |
| Online Erişim: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6359033/ https://ncbi.nlm.nih.gov/pubmed/30669494 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19020406 |
| Etiketler: |
Etiketle
Etiket eklenmemiş, İlk siz ekleyin!
|