A carregar...
Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection
This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silico...
Na minha lista:
| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6359033/ https://ncbi.nlm.nih.gov/pubmed/30669494 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19020406 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|