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Crystallographically Determined Etching and Its Relevance to the Metal-Assisted Catalytic Etching (MACE) of Silicon Powders
Metal-assisted catalytic etching (MACE) using Ag nanoparticles as catalysts and H(2)O(2) as oxidant has been performed on single-crystal Si wafers, single-crystal electronics grade Si powders, and polycrystalline metallurgical grade Si powders. The temperature dependence of the etch kinetics has bee...
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| 出版年: | Front Chem |
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| 主要な著者: | , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Frontiers Media S.A.
2019
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6343677/ https://ncbi.nlm.nih.gov/pubmed/30701171 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3389/fchem.2018.00651 |
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