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Nanostructure and Optical Property Investigations of SrTiO(3) Films Deposited by Magnetron Sputtering

Strontium titanate thin films were deposited on a silicon substrate by radio-frequency magnetron sputtering. The structural and optical properties of these films were characterized by X-ray diffraction, high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and spectrosc...

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Detalhes bibliográficos
Publicado no:Materials (Basel)
Main Authors: Xu, Da, Yuan, Yafei, Zhu, Huanfeng, Cheng, Ling, Liu, Chunmin, Su, Jing, Zhang, Xintong, Zhang, Hao, Zhang, Xia, Li, Jing
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6337090/
https://ncbi.nlm.nih.gov/pubmed/30609837
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12010138
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