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Reduction of Parasitic Capacitance of A PDMS Capacitive Force Sensor
Polymer-based flexible micro electro mechanical systems (MEMS) tactile sensors have been widely studied for a variety of applications, such as medical and robot fields. The small size and flexibility are of great advantage in terms of accurate measurement and safety. Polydimethylsiloxane (PDMS) is o...
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| Veröffentlicht in: | Micromachines (Basel) |
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| Hauptverfasser: | , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6266689/ https://ncbi.nlm.nih.gov/pubmed/30715069 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9110570 |
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