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Reduction of Parasitic Capacitance of A PDMS Capacitive Force Sensor

Polymer-based flexible micro electro mechanical systems (MEMS) tactile sensors have been widely studied for a variety of applications, such as medical and robot fields. The small size and flexibility are of great advantage in terms of accurate measurement and safety. Polydimethylsiloxane (PDMS) is o...

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Bibliografski detalji
Izdano u:Micromachines (Basel)
Glavni autori: Nagatomo, Tatsuho, Miki, Norihisa
Format: Artigo
Jezik:Inglês
Izdano: MDPI 2018
Teme:
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC6266689/
https://ncbi.nlm.nih.gov/pubmed/30715069
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9110570
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