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A 5 g Inertial Micro-Switch with Enhanced Threshold Accuracy Using Squeeze-Film Damping
Our previous report based on a 10 g (gravity) silicon-based inertial micro-switch showed that the contact effect between the two electrodes can be improved by squeeze-film damping. As an extended study toward its potential applications, the switch with a large proof mass suspended by four flexible s...
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| Publicado en: | Micromachines (Basel) |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2018
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6266094/ https://ncbi.nlm.nih.gov/pubmed/30715038 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9110539 |
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