Cargando...

A 5 g Inertial Micro-Switch with Enhanced Threshold Accuracy Using Squeeze-Film Damping

Our previous report based on a 10 g (gravity) silicon-based inertial micro-switch showed that the contact effect between the two electrodes can be improved by squeeze-film damping. As an extended study toward its potential applications, the switch with a large proof mass suspended by four flexible s...

Descrición completa

Gardado en:
Detalles Bibliográficos
Publicado en:Micromachines (Basel)
Main Authors: Peng, Yingchun, Wu, Guoguo, Pan, Chunpeng, Lv, Cheng, Luo, Tianhong
Formato: Artigo
Idioma:Inglês
Publicado: MDPI 2018
Assuntos:
Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC6266094/
https://ncbi.nlm.nih.gov/pubmed/30715038
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9110539
Tags: Engadir etiqueta
Sen Etiquetas, Sexa o primeiro en etiquetar este rexistro!