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Tape nanolithography: a rapid and simple method for fabricating flexible, wearable nanophotonic devices
This paper describes a tape nanolithography method for the rapid and economical manufacturing of flexible, wearable nanophotonic devices. This method involves the soft lithography of a donor substrate with air-void nanopatterns, subsequent deposition of materials onto the substrate surface, followed...
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| Publicado no: | Microsyst Nanoeng |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6220255/ https://ncbi.nlm.nih.gov/pubmed/31057919 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41378-018-0031-4 |
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