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Tape nanolithography: a rapid and simple method for fabricating flexible, wearable nanophotonic devices

This paper describes a tape nanolithography method for the rapid and economical manufacturing of flexible, wearable nanophotonic devices. This method involves the soft lithography of a donor substrate with air-void nanopatterns, subsequent deposition of materials onto the substrate surface, followed...

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Publicat a:Microsyst Nanoeng
Autors principals: Wang, Qiugu, Han, Weikun, Wang, Yifei, Lu, Meng, Dong, Liang
Format: Artigo
Idioma:Inglês
Publicat: Nature Publishing Group UK 2018
Matèries:
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC6220255/
https://ncbi.nlm.nih.gov/pubmed/31057919
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41378-018-0031-4
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