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A power supply module for autonomous portable electronics: ultralow-frequency MEMS electrostatic kinetic energy harvester with a comb structure reducing air damping

A MEMS electrostatic kinetic energy harvester (e-KEH) of about 1 cm(2), working at ultralow frequency (1–20 Hz), without any supported additional mass on its mobile electrode, and working even without a vacuum environment is reported. The prototype is especially suitable for environments with abunda...

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Bibliografski detalji
Izdano u:Microsyst Nanoeng
Glavni autori: Lu, Yingxian, Marty, Frédéric, Galayko, Dimitri, Laheurte, Jean-Marc, Basset, Philippe
Format: Artigo
Jezik:Inglês
Izdano: Nature Publishing Group UK 2018
Teme:
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC6220193/
https://ncbi.nlm.nih.gov/pubmed/31057916
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41378-018-0025-2
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