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Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications

New mobile devices need microphones with a small size, low noise level, reduced cost and high stability respect to variations of temperature and humidity. These characteristics can be obtained using Microelectromechanical Systems (MEMS) microphones, which are substituting for conventional electret c...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Peña-García, Néstor N., Aguilera-Cortés, Luz A., González-Palacios, Max A., Raskin, Jean-Pierre, Herrera-May, Agustín L.
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6209879/
https://ncbi.nlm.nih.gov/pubmed/30347743
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18103545
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