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In-Plane MEMS Shallow Arch Beam for Mechanical Memory
We demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inher...
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| Publicat a: | Micromachines (Basel) |
|---|---|
| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2016
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6189999/ https://ncbi.nlm.nih.gov/pubmed/30404364 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7100191 |
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