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Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads
We present a simulation and experimental investigation of bi-directional tunable in-plane clamped–guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes its natural...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6189952/ https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8010014 |
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