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Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching
We introduce a non-lithographical and vacuum-free method to pattern silicon. The method combines inkjet printing and metal assisted chemical etching (MaCE); we call this method “INKMAC”. A commercial silver ink is printed on top of a silicon surface to create the catalytic patterns for MaCE. The MaC...
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| Udgivet i: | Micromachines (Basel) |
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| Main Authors: | , , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2016
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6189811/ https://ncbi.nlm.nih.gov/pubmed/30404394 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7120222 |
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