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Nano-Scale Positioning Design with Piezoelectric Materials
Piezoelectric materials naturally possess high potential to deliver nano-scale positioning resolution; hence, they are adopted in a variety of engineering applications widely. Unfortunately, unacceptable positioning errors always appear because of the natural hysteresis effect of the piezoelectric m...
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| Veröffentlicht in: | Micromachines (Basel) |
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| Hauptverfasser: | , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2017
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187864/ https://ncbi.nlm.nih.gov/pubmed/30400550 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8120360 |
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