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Nano-Scale Positioning Design with Piezoelectric Materials

Piezoelectric materials naturally possess high potential to deliver nano-scale positioning resolution; hence, they are adopted in a variety of engineering applications widely. Unfortunately, unacceptable positioning errors always appear because of the natural hysteresis effect of the piezoelectric m...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Chen, Yung Yue, Chen, Yung Hsiang, Huang, Chiung Yau
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6187864/
https://ncbi.nlm.nih.gov/pubmed/30400550
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8120360
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