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Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer

This paper presents a fibered-epitaxial lead zirconate titanate (PZT) thin film with intermediate features between the monocrystalline and polycrystalline thin films for piezoelectric micromachined ultrasound transducer (pMUT). The grain boundaries confirmed by scanning electron microscopy, but it s...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Ngoc Thao, Pham, Yoshida, Shinya, Tanaka, Shuji
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2018
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6187569/
https://ncbi.nlm.nih.gov/pubmed/30424388
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9090455
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