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Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer

This paper presents a fibered-epitaxial lead zirconate titanate (PZT) thin film with intermediate features between the monocrystalline and polycrystalline thin films for piezoelectric micromachined ultrasound transducer (pMUT). The grain boundaries confirmed by scanning electron microscopy, but it s...

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Dades bibliogràfiques
Publicat a:Micromachines (Basel)
Autors principals: Ngoc Thao, Pham, Yoshida, Shinya, Tanaka, Shuji
Format: Artigo
Idioma:Inglês
Publicat: MDPI 2018
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Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC6187569/
https://ncbi.nlm.nih.gov/pubmed/30424388
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9090455
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