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Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer

This paper presents a fibered-epitaxial lead zirconate titanate (PZT) thin film with intermediate features between the monocrystalline and polycrystalline thin films for piezoelectric micromachined ultrasound transducer (pMUT). The grain boundaries confirmed by scanning electron microscopy, but it s...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Ngoc Thao, Pham, Yoshida, Shinya, Tanaka, Shuji
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6187569/
https://ncbi.nlm.nih.gov/pubmed/30424388
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9090455
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