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The Phase Evolution and Physical Properties of Binary Copper Oxide Thin Films Prepared by Reactive Magnetron Sputtering

P-type binary copper oxide semiconductor films for various O(2) flow rates and total pressures (P(t)) were prepared using the reactive magnetron sputtering method. Their morphologies and structures were detected by X-ray diffraction, Raman spectrometry, and SEM. A phase diagram with Cu(2)O, Cu(4)O(3...

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Detalhes bibliográficos
Publicado no:Materials (Basel)
Main Authors: Zheng, Weifeng, Chen, Yue, Peng, Xihong, Zhong, Kehua, Lin, Yingbin, Huang, Zhigao
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6073460/
https://ncbi.nlm.nih.gov/pubmed/30037000
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma11071253
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