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Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity
This paper proposes a novel micro-electromechanical system (MEMS) piezoresistive pressure sensor with a four-petal membrane combined with narrow beams and a center boss (PMNBCB) for low-pressure measurements. The stresses induced in the piezoresistors and deflection of the membrane were calculated u...
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| Gepubliceerd in: | Sensors (Basel) |
|---|---|
| Hoofdauteurs: | , , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
MDPI
2018
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| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6069098/ https://ncbi.nlm.nih.gov/pubmed/29937534 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18072023 |
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