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Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity

This paper proposes a novel micro-electromechanical system (MEMS) piezoresistive pressure sensor with a four-petal membrane combined with narrow beams and a center boss (PMNBCB) for low-pressure measurements. The stresses induced in the piezoresistors and deflection of the membrane were calculated u...

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Bibliografische gegevens
Gepubliceerd in:Sensors (Basel)
Hoofdauteurs: Tran, Anh Vang, Zhang, Xianmin, Zhu, Benliang
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI 2018
Onderwerpen:
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6069098/
https://ncbi.nlm.nih.gov/pubmed/29937534
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18072023
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