Nalaganje...
Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges
This article presents the design, manufacture and testing of a capacitive pressure sensor with a high, tunable performance to low compressive loads (<10 kPa) and a resolution of less than 0.5 kPa. Such a performance is required for the monitoring of treatment efficacy delivered by compression gar...
Shranjeno v:
| izdano v: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI
2017
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190296/ https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8020041 |
| Oznake: |
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