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Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors
This paper proposes a decoupled six degrees of freedom (DOF) displacement measurement methodology, which is accomplished by utilizing six pairs of permanent magnets and six Hall sensors. Firstly, the coordinate transformation was mathematically derived, which represented the relationships between th...
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| Publicat a: | Sensors (Basel) |
|---|---|
| Autors principals: | , , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2018
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6068923/ https://ncbi.nlm.nih.gov/pubmed/29941825 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18072030 |
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