Zhao, B., Shi, W., Zhang, J., Zhang, M., Qi, X., Li, J., . . . Tan, J. (2018). Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors. Sensors (Basel).

Zhao, Bo, Weijia Shi, Jiawei Zhang, Ming Zhang, Xue Qi, Jiaxin Li, Feng Li, و Jiubin Tan. "Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors." Sensors (Basel) 2018.

Zhao, Bo, et al. "Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors." Sensors (Basel) 2018.