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An Investigation of the Wear on Silicon Surface at High Humidity
Using an atomic force microscope (AFM), the wear of monocrystalline silicon (covered by a native oxide layer) at high humidity was investigated. The experimental results indicated that tribochemistry played an important role in the wear of the silicon at different relative humidity levels (RH = 60%,...
Gardado en:
| Publicado en: | Materials (Basel) |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2018
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6025518/ https://ncbi.nlm.nih.gov/pubmed/29914157 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma11061027 |
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