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Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography
We present a comparative study of plasmonic antennas fabricated by electron beam lithography and direct focused ion beam milling. We have investigated optical and structural properties and chemical composition of gold disc-shaped plasmonic antennas on a silicon nitride membrane fabricated by both me...
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| Publicat a: | Sci Rep |
|---|---|
| Autors principals: | , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Nature Publishing Group UK
2018
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6018609/ https://ncbi.nlm.nih.gov/pubmed/29941880 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-28037-1 |
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