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Frequency Invariability of (Pb,La)(Zr,Ti)O(3) Antiferroelectric Thick-Film Micro-Cantilevers
Micro-electromechanical systems comprising antiferroelectric layers can offer both actuation and transduction to integrated technologies. Micro-cantilevers based on the (Pb(0.97)La(0.02))(Zr(0.95)Ti(0.05))O(3) (PLZT) antiferroelectric thick film are fabricated by the micro-nano manufacturing process...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5981683/ https://ncbi.nlm.nih.gov/pubmed/29757249 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18051542 |
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