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A New Design of a Single-Device 3D Hall Sensor: Cross-Shaped 3D Hall Sensor
In this paper, a new single-device three-dimensional (3D) Hall sensor called a cross-shaped 3D Hall device is designed based on the five-contact vertical Hall device. Some of the device parameters are based on 0.18 μm BCDlite(TM) technology provided by GLOBALFOUNDRIES. Two-dimensional (2D) and 3D fi...
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| Udgivet i: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2018
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5948623/ https://ncbi.nlm.nih.gov/pubmed/29614815 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18041065 |
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