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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques to create an application-based microelectromechanical systems (MEMS) filter and how to use it efficiently (i.e., tuning the tuning-capability and a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:J Vis Exp
1. Verfasser: Goktas, Hasan
Format: Artigo
Sprache:Inglês
Veröffentlicht: MyJove Corporation 2018
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5912352/
https://ncbi.nlm.nih.gov/pubmed/29443068
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/56371
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