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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques to create an application-based microelectromechanical systems (MEMS) filter and how to use it efficiently (i.e., tuning the tuning-capability and a...

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Publicado no:J Vis Exp
Autor principal: Goktas, Hasan
Formato: Artigo
Idioma:Inglês
Publicado em: MyJove Corporation 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5912352/
https://ncbi.nlm.nih.gov/pubmed/29443068
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/56371
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