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Micro-thermocouple on nano-membrane: thermometer for nanoscale measurements
A thermocouple of Au-Ni with only 2.5-μm-wide electrodes on a 30-nm-thick Si(3)N(4) membrane was fabricated by a simple low-resolution electron beam lithography and lift off procedure. The thermocouple is shown to be sensitive to heat generated by laser as well as an electron beam. Nano-thin membran...
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| Published in: | Sci Rep |
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| Main Authors: | , , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
Nature Publishing Group UK
2018
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5910443/ https://ncbi.nlm.nih.gov/pubmed/29679036 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-24583-w |
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