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Micro-thermocouple on nano-membrane: thermometer for nanoscale measurements

A thermocouple of Au-Ni with only 2.5-μm-wide electrodes on a 30-nm-thick Si(3)N(4) membrane was fabricated by a simple low-resolution electron beam lithography and lift off procedure. The thermocouple is shown to be sensitive to heat generated by laser as well as an electron beam. Nano-thin membran...

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Bibliografski detalji
Izdano u:Sci Rep
Glavni autori: Balčytis, Armandas, Ryu, Meguya, Juodkazis, Saulius, Morikawa, Junko
Format: Artigo
Jezik:Inglês
Izdano: Nature Publishing Group UK 2018
Teme:
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC5910443/
https://ncbi.nlm.nih.gov/pubmed/29679036
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-24583-w
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