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Palladium gates for reproducible quantum dots in silicon
We replace the established aluminium gates for the formation of quantum dots in silicon with gates made from palladium. We study the morphology of both aluminium and palladium gates with transmission electron microscopy. The native aluminium oxide is found to be formed all around the aluminium gates...
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| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5890286/ https://ncbi.nlm.nih.gov/pubmed/29632303 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-24004-y |
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