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High quality self-separated GaN crystal grown on a novel nanoporous template by HVPE

In this study, a novel nanoporous template was obtained by a two-step etching process from MOCVD-GaN/Al(2)O(3) (MGA) with electrochemical etching sequentially followed by chemical wet etching. The twice-etched MOCVD-GaN/Al(2)O(3) (TEMGA) templates were utilized to grow GaN crystals by hydride vapor...

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Bibliografske podrobnosti
izdano v:Sci Rep
Main Authors: Huo, Qin, Shao, Yongliang, Wu, Yongzhong, Zhang, Baoguo, Hu, Haixiao, Hao, Xiaopeng
Format: Artigo
Jezik:Inglês
Izdano: Nature Publishing Group UK 2018
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC5816597/
https://ncbi.nlm.nih.gov/pubmed/29453376
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-21607-3
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