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High quality self-separated GaN crystal grown on a novel nanoporous template by HVPE
In this study, a novel nanoporous template was obtained by a two-step etching process from MOCVD-GaN/Al(2)O(3) (MGA) with electrochemical etching sequentially followed by chemical wet etching. The twice-etched MOCVD-GaN/Al(2)O(3) (TEMGA) templates were utilized to grow GaN crystals by hydride vapor...
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| 發表在: | Sci Rep |
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| Main Authors: | , , , , , |
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
Nature Publishing Group UK
2018
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| 主題: | |
| 在線閱讀: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5816597/ https://ncbi.nlm.nih.gov/pubmed/29453376 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-21607-3 |
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