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Integrated monolithic 3D MEMS scanner for switchable real time vertical/horizontal cross-sectional imaging
We present an integrated monolithic, electrostatic 3D MEMS scanner with a compact chip size of 3.2 × 2.9 mm(2). Use of parametric excitation near resonance frequencies produced large optical deflection angles up to ± 27° and ± 28.5° in the X- and Y-axes and displacements up to 510 μm in the Z-axis w...
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| Published in: | Opt Express |
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| Main Authors: | , , , , , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
Optical Society of America
2016
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5802237/ https://ncbi.nlm.nih.gov/pubmed/26906790 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1364/OE.24.002145 |
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