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Electron beam induced removal of PMMA layer used for graphene transfer

We demonstrate the development of an effective technique to remove the poly methyl methacrylate (PMMA) layer used for transferring graphene synthesized by a chemical vapor deposition (CVD). This was achieved utilizing electron-beam bombardment and following developing processes, prior to the use of...

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Publicat a:Sci Rep
Autors principals: Son, B. H., Kim, H. S., Jeong, H., Park, Ji-Yong, Lee, Soonil, Ahn, Y. H.
Format: Artigo
Idioma:Inglês
Publicat: Nature Publishing Group UK 2017
Matèries:
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC5741774/
https://ncbi.nlm.nih.gov/pubmed/29273714
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-18444-1
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