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Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes

This paper presents a theoretical analysis of mechanical and electrical noise in the sense channel of micro-electromechanical systems (MEMS) vibratory gyroscopes. Closed-form expressions for the power spectral density (PSD) of the noise equivalent rate (NER) of gyroscopes in the open-loop and the fo...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Ding, Xukai, Jia, Jia, Gao, Yang, Li, Hongsheng
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5677439/
https://ncbi.nlm.nih.gov/pubmed/29019955
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17102306
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