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Interface Characteristics of Sapphire Direct Bonding for High-Temperature Applications

In this letter, we present a sapphire direct bonding method using plasma surface activation, hydrophilic pre-bonding, and high temperature annealing. Through the combination of sapphire inductively coupled plasma etching and the direct bonding process, a vacuum-sealed cavity employable for high temp...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Li, Wangwang, Liang, Ting, Chen, Yulei, Jia, Pinggang, Xiong, Jijun, Hong, Yingping, Lei, Cheng, Yao, Zong, Qi, Lei, Liu, Wenyi
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5621027/
https://ncbi.nlm.nih.gov/pubmed/28892010
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17092080
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