Near room temperature chemical vapor deposition of graphene with diluted methane and molten gallium catalyst

Direct growth of graphene integrated into electronic devices is highly desirable but difficult due to the nominal ~1000 °C chemical vapor deposition (CVD) temperature, which can seriously deteriorate the substrates. Here we report a great reduction of graphene CVD temperature, down to 50 °C on sapph...

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Udgivet i:Sci Rep
Main Authors: Fujita, Jun-ichi, Hiyama, Takaki, Hirukawa, Ayaka, Kondo, Takahiro, Nakamura, Junji, Ito, Shin-ichi, Araki, Ryosuke, Ito, Yoshikazu, Takeguchi, Masaki, Pai, Woei Wu
Format: Artigo
Sprog:Inglês
Udgivet: Nature Publishing Group UK 2017
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Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5620074/
https://ncbi.nlm.nih.gov/pubmed/28959046
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-12380-w
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