Near room temperature chemical vapor deposition of graphene with diluted methane and molten gallium catalyst

Direct growth of graphene integrated into electronic devices is highly desirable but difficult due to the nominal ~1000 °C chemical vapor deposition (CVD) temperature, which can seriously deteriorate the substrates. Here we report a great reduction of graphene CVD temperature, down to 50 °C on sapph...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Fujita, Jun-ichi, Hiyama, Takaki, Hirukawa, Ayaka, Kondo, Takahiro, Nakamura, Junji, Ito, Shin-ichi, Araki, Ryosuke, Ito, Yoshikazu, Takeguchi, Masaki, Pai, Woei Wu
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2017
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5620074/
https://ncbi.nlm.nih.gov/pubmed/28959046
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-12380-w
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