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Growth and Fabrication of High External Quantum Efficiency AlGaN-Based Deep Ultraviolet Light-Emitting Diode Grown on Pattern Si Substrate

Growing III-V semiconductor materials on Si substrates for opto-electronic applications is challenging because their high lattice mismatch and different thermal expansion coefficients cause the epitaxial layers to have low quality. Here we report the growth of a high-quality AlN template on a micro-...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Tran, Binh Tinh, Hirayama, Hideki
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5610239/
https://ncbi.nlm.nih.gov/pubmed/28939802
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-11757-1
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