Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes

Lignende værker

• Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
  af: Yi-Pei Tsai, et al.
  Udgivet: (2017-09-01)
• Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
  af: Tsai, Yi-Pei, et al.
  Udgivet: (2017)
• Test Pattern Design for Plasma Induced Damage on Inter-Metal Dielectric in FinFET Cu BEOL Processes
  af: Su, Chi, et al.
  Udgivet: (2020)
• Test Pattern Design for Plasma Induced Damage on Inter-Metal Dielectric in FinFET Cu BEOL Processes
  af: Chi Su, et al.
  Udgivet: (2020-05-01)
• Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology
  af: Wang, Chien-Ping, et al.
  Udgivet: (2021)