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Evolution of Helium Bubbles and Discs in Irradiated 6H-SiC during Post-Implantation Annealing
The single crystal 6H-SiC with [0001] crystal direction irradiated by 400 keV He(+) ions with 1 × 10(17) ions/cm(2) fluence at 400 °C were annealed at 600, 900, 1200 and 1400 °C for different durations. The evolution of helium bubbles and discs was investigated by transmission electron microscopy. A...
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| Publicado no: | Materials (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5459187/ https://ncbi.nlm.nih.gov/pubmed/28772459 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma10020101 |
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