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Formation of Micro- and Nanostructures on the Nanotitanium Surface by Chemical Etching and Deposition of Titania Films by Atomic Layer Deposition (ALD)

In this study, an integrated approach was used for the preparation of a nanotitanium-based bioactive material. The integrated approach included three methods: severe plastic deformation (SPD), chemical etching and atomic layer deposition (ALD). For the first time, it was experimentally shown that th...

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Detalhes bibliográficos
Publicado no:Materials (Basel)
Main Authors: Nazarov, Denis V., Zemtsova, Elena G., Valiev, Ruslan Z., Smirnov, Vladimir M.
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2015
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5458839/
https://ncbi.nlm.nih.gov/pubmed/28793716
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma8125460
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