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Atomic layer deposition (ALD): A versatile technique for plasmonics and nanobiotechnology

While atomic layer deposition (ALD) has been used for many years as an industrial manufacturing method for microprocessors and displays, this versatile technique is finding increased use in the emerging fields of plasmonics and nanobiotechnology. In particular, ALD coatings can modify metallic surfa...

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Detaylı Bibliyografya
Asıl Yazarlar: Im, Hyungsoon, Wittenberg, Nathan J., Lindquist, Nathan C., Oh, Sang-Hyun
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: 2012
Konular:
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC3410655/
https://ncbi.nlm.nih.gov/pubmed/22865951
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1557/jmr.2011.434
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