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Modeling the Microstructure Curvature of Boron-Doped Silicon in Bulk Micromachined Accelerometer
Microstructure curvature, or buckling, is observed in the micromachining of silicon sensors because of the doping of impurities for realizing certain electrical and mechanical processes. This behavior can be a key source of error in inertial sensors. Therefore, identifying the factors that influence...
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| 出版年: | Materials (Basel) |
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| 主要な著者: | , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2013
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5452111/ https://ncbi.nlm.nih.gov/pubmed/28809305 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma6010244 |
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