Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films

We report the successful demonstration of a hybrid system that combines pulsed laser deposition (PLD) and magnetron sputtering (MS) to deposit high quality thin films. The PLD and MS simultaneously use the same target, leading to an enhanced deposition rate. The performance of this technique is demo...

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Detaylı Bibliyografya
Yayımlandı:Sci Rep
Asıl Yazarlar: Benetti, D., Nouar, R., Nechache, R., Pepin, H., Sarkissian, A., Rosei, F., MacLeod, J. M.
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: Nature Publishing Group UK 2017
Konular:
Article
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC5451404/
https://ncbi.nlm.nih.gov/pubmed/28566679
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-02284-0
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