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Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films
We report the successful demonstration of a hybrid system that combines pulsed laser deposition (PLD) and magnetron sputtering (MS) to deposit high quality thin films. The PLD and MS simultaneously use the same target, leading to an enhanced deposition rate. The performance of this technique is demo...
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| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5451404/ https://ncbi.nlm.nih.gov/pubmed/28566679 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-02284-0 |
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