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Monolithic Integration of a Silicon Nanowire Field-Effect Transistors Array on a Complementary Metal-Oxide Semiconductor Chip for Biochemical Sensor Applications

We present a monolithic complementary metal-oxide semiconductor (CMOS)-based sensor system comprising an array of silicon nanowire field-effect transistors (FETs) and the signal-conditioning circuitry on the same chip. The silicon nanowires were fabricated by chemical vapor deposition methods and th...

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Detalhes bibliográficos
Publicado no:Anal Chem
Main Authors: Livi, Paolo, Kwiat, Moria, Shadmani, Amir, Pevzner, Alexander, Navarra, Giulio, Rothe, Jörg, Stettler, Alexander, Chen, Yihui, Patolsky, Fernando, Hierlemann, Andreas
Formato: Artigo
Idioma:Inglês
Publicado em: 2015
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5424868/
https://ncbi.nlm.nih.gov/pubmed/26348408
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.analchem.5b02604
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