Wird geladen...
Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness
Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also tra...
Gespeichert in:
| Veröffentlicht in: | Sensors (Basel) |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2017
|
| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5422052/ https://ncbi.nlm.nih.gov/pubmed/28383483 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17040779 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|